Spectroscopic Study of Oxygen Agglomeration In Step-annealed Czochralski Silicon

Dr. Ritu Agarwal

CZ- Silicon, Thermal donor, New donor, Thermal acceptor, Interstitial Oxygen, Pre-annealing.

Czochralski-grown silicon being the chief material for the fabrication of electronic devices, needs to be studied thoroughly. During the growth process of CZ Si, oxygen gets trapped at interstitial sites. Here in this study, variation in concentration of interstitial oxygen with annealing time is studied as a result of pre-annealing at moderate temperature 480°C in carbon-rich boron-doped (p-type) CZ-silicon. Correlation of this concentration with the generation and annihilation of thermal donors (TDs) and new donors (NDs) has been studied using Hall effect and FTIR studies. Oxygen concentration is determined by evaluating absorption coefficient of oxygen from the IR spectrum of the specimens with successive annealing in steps of 10 hrs. It is seen that more and more oxygen gets precipitated with the increase in annealing time due to the formation of TDs and NDs. It is also seen that the concentration of interstitial oxygen after annealing is higher than the initial concentration. An attempt has been made to explain the reasons behind this.

Published Paper   E-Certificate

"Spectroscopic Study of Oxygen Agglomeration In Step-annealed Czochralski Silicon", IJSDR - International Journal of Scientific Development and Research (www.IJSDR.org), ISSN:2455-2631, Vol.9, Issue 3, page no.269 - 273, March-2024, Available :https://ijsdr.org/papers/IJSDR2403041.pdf

Volume 9 Issue 3, March-2024

Pages : 269 - 273

Paper Reg. ID: IJSDR_210351

Published Paper Id: IJSDR2403041

Downloads: 000347079

Research Area: Physics

Country: BAREILLY, Uttar Pradesh, India

Published Paper PDF: https://ijsdr.org/papers/IJSDR2403041

Published Paper URL: https://ijsdr.org/viewpaperforall?paper=IJSDR2403041

ISSN: 2455-2631 | IMPACT FACTOR: 9.15 Calculated By Google Scholar | ESTD YEAR: 2016

An International Scholarly Open Access Journal, Peer-Reviewed, Refereed Journal Impact Factor 9.15 Calculate by Google Scholar and Semantic Scholar | AI-Powered Research Tool, Multidisciplinary, Monthly, Multilanguage Journal Indexing in All Major Database & Metadata, Citation Generator

Publisher: IJSDR(IJ Publication) Janvi Wave

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