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INTERNATIONAL JOURNAL OF SCIENTIFIC DEVELOPMENT AND RESEARCH International Peer Reviewed & Refereed Journals, Open Access Journal ISSN Approved Journal No: 2455-2631 | Impact factor: 8.15 | ESTD Year: 2016 open access , Peer-reviewed, and Refereed Journals, Impact factor 8.15 |
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| Paper Title: | MEMS BASED PIEZOELECTRIC RATE GYROSCOPE |
| Authors Name: | Sudha R Karbari , M Kavya Shree , Labdhi Jain |
| Unique Id: | IJSDR1905011 |
| Published In: | Volume 4 Issue 5, May-2019 |
| Abstract: | This paper aims at designing and analyzing the model through experimental measurements on piezoelectric rate gyroscope. Conventional MEMS gyroscopes work on the principle of Coriolis force whereas the present work also includes the piezoelectric property of the structural material. The sacrificial etching of the proposed model needs an optimization for the material Quartz. The inclusion of serpentine beams reduces the stress and henceforth enhances the signal conditioning capability of the device through change in capacitance. Numerical simulation of frequencies ,displacement, and stress is computed using COMSOL Multiphysics software package. The maximum displacement occurs at 35.652 Hz with the value of 5.02×10e-9m and the stress experienced is 2.09×10e12 N/m2. |
| Keywords: | MEMS gyroscope ,drive tines, Coriolis force ,angular acceleration. |
| Cite Article: | "MEMS BASED PIEZOELECTRIC RATE GYROSCOPE", International Journal of Science & Engineering Development Research (www.ijsdr.org), ISSN:2455-2631, Vol.4, Issue 5, page no.68 - 74, May-2019, Available :http://www.ijsdr.org/papers/IJSDR1905011.pdf |
| Downloads: | 000337070 |
| Publication Details: | Published Paper ID: IJSDR1905011 Registration ID:190426 Published In: Volume 4 Issue 5, May-2019 DOI (Digital Object Identifier): Page No: 68 - 74 Publisher: IJSDR | www.ijsdr.org ISSN Number: 2455-2631 |
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